Technology of latent image writing in chromium films in application to synthesizing precision angle measuring structures
A. V. Kiryanov, V. G. NikitinТом:
45
Мова:
english
Сторінки:
7
DOI:
10.1134/s8756699009010129
Date:
February, 2009
Файл:
PDF, 386 KB
english, 2009