Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2001 Vol. 179; Iss. 3
An experimental investigation of angular resolved energy distributions of atoms sputtered from evaporated aluminum films
A. Goehlich, D. Gillmann, H.F. DöbeleТом:
179
Рік:
2001
Мова:
english
Сторінки:
13
DOI:
10.1016/s0168-583x(01)00573-0
Файл:
PDF, 252 KB
english, 2001