Fabrication of Copper Damascene Patterns on Polyimide Using Direct Metallization on Trench Templates Generated by Imprint Lithography
Matsumura, Yasufumi, Enomoto, Yasushi, Tsuruoka, Takaaki, Akamatsu, Kensuke, Nawafune, HidemiТом:
26
Мова:
english
Журнал:
Langmuir
DOI:
10.1021/la101350f
Date:
July, 2010
Файл:
PDF, 1.03 MB
english, 2010