Interfaces and Composition Profiles in Metal–Sulfide Nanolayers Synthesized by Atomic Layer Deposition
Thimsen, Elijah, Baryshev, Sergey V., Martinson, Alex B. F., Elam, Jeffrey W., Veryovkin, Igor V., Pellin, Michael J.Том:
25
Мова:
english
Журнал:
Chemistry of Materials
DOI:
10.1021/cm3027225
Date:
February, 2013
Файл:
PDF, 1.29 MB
english, 2013