[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - A new fabrication technique for integrating silica optical devices and MEMS
Grutter, Karen E., Yeh, Anthony M., Patra, Susant K., Wu, Ming C.Рік:
2010
Мова:
english
DOI:
10.1109/OMEMS.2010.5672199
Файл:
PDF, 1.63 MB
english, 2010