[IEEE 2012 IEEE 13th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2012) - Altai, Erlagol, Russia (2012.07.2-2012.07.6)] International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Peculiarities of chemical etching of the annealed proton exchange channel waveguides fabricated on Z cut of lithium niobate crystal
Kichigin, Vladimir I., Petukhov, Igor V., Mushinsky, Sergey S., Minkin, Alexander M., Oborin, Vladimir A., Shevtsov, Denis I., Volyntsev, Anatoly B.Рік:
2012
Мова:
english
DOI:
10.1109/EDM.2012.6310224
Файл:
PDF, 582 KB
english, 2012
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