SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - The influence of physical characteristics on ablation effects in UV laser assisted micro-engineering
Ostendorf, Andreas, Kulik, Christian J., Temme, Thorsten, Otte, Frank, Samm, Katja, Miyamoto, Isamu, Helvajian, Henry, Itoh, Kazuyoshi, Kobayashi, Kojiro F., Ostendorf, Andreas, Sugioka, KojiРік:
2012
Мова:
english
DOI:
10.1117/12.596754
Файл:
PDF, 492 KB
english, 2012