Modeling and Analysis of Thin Film PolySi Diaphragm Pressure Sensor
Sathyanarayanan, S., Vimala Juliet, A.Том:
38
Мова:
english
Журнал:
Arabian Journal for Science and Engineering
DOI:
10.1007/s13369-012-0379-y
Date:
March, 2013
Файл:
PDF, 765 KB
english, 2013