Threshold-voltage distribution of Pt/SrBi 2 Ta 2 O 9 /Hf–Al–O/Si MFIS FETs
Li, Qiu-Hong, Takahashi, Mitsue, Horiuchi, Takeshi, Wang, Shouyu, Sakai, ShigekiТом:
23
Мова:
english
Журнал:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/23/4/045011
Date:
April, 2008
Файл:
PDF, 303 KB
english, 2008