Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems
Mao-Sheng, Zheng, Gen-Shu, Zhou, Wen-Zhen, Zhao, Hai-Cheng, GuТом:
19
Мова:
english
Журнал:
Chinese Physics Letters
DOI:
10.1088/0256-307X/19/6/327
Date:
June, 2002
Файл:
PDF, 208 KB
english, 2002