Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target
Guisheng Zhu, Zupei YangТом:
24
Мова:
english
DOI:
10.1007/s10854-013-1298-8
Date:
October, 2013
Файл:
PDF, 856 KB
english, 2013