Design and Fabrication of Addressable Microfluidic Energy Storage MEMS Device
Lifton, Victor A., Simon, Steve, Holmqvist, Johan, Ebefors, Thorbjörn, Jansson, David, Svedin, NiklasТом:
21
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2208218
Date:
December, 2012
Файл:
PDF, 741 KB
english, 2012