SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Silanized polymeric working stamps for hot embossing lithography
Wissen, Matthias, Bogdanski, N., Jerzy, R., Berrada, Z. E., Fink, Marion, Reuther, Freimut, Glinsner, Thomas, Scheer, Hella-Christin, Mackay, R. ScottТом:
5374
Рік:
2004
Мова:
english
DOI:
10.1117/12.532733
Файл:
PDF, 2.59 MB
english, 2004