[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoresistive cantilever probes for simultaneous nanoscale topography and conductivity imaging
Yang, Yongliang, Ma, Yue, Haemmerli, Alexandre, Lai, Keji, Kundhikanjana, Worasom, Harjee, Nahid, Pruitt, Beth, Li, Xinxin, Kelly, Michael, Shen, Zhi-XunРік:
2013
Мова:
english
DOI:
10.1109/MEMSYS.2013.6474243
Файл:
PDF, 863 KB
english, 2013
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