[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoelectric micro-scale mechanical computing system
Proie, Robert M., Pulskamp, Jeffrey S., Polcawich, Ronald G., Ivanov, TonyРік:
2012
Мова:
english
DOI:
10.1109/MEMSYS.2012.6170243
Файл:
PDF, 1.16 MB
english, 2012