Effects of nitrogen flow ratio on the structure and properties of reactively sputtered (AlMoNbSiTaTiVZr)N x coatings
Tsai, Ming-Hung, Lai, Chia-Han, Yeh, Jien-Wei, Gan, Jon-YiewТом:
41
Мова:
english
Журнал:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/23/235402
Date:
December, 2008
Файл:
PDF, 1.88 MB
english, 2008