SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer
Seppä, Jeremias, Lehmann, Peter H., Osten, Wolfgang, Kassamakov, Ivan, Nolvi, Anton, Albertazzi, Armando, Heikkinen, Ville, Paulin, Tor, Lassila, Antti, Hao, Ling, Hæggsröm, EdwardТом:
8788
Рік:
2013
Мова:
english
DOI:
10.1117/12.2020525
Файл:
PDF, 1.09 MB
english, 2013