Growth and characterization of diamond films on TiN/Si(100) by microwave plasma chemical vapor deposition
Chen, Wei-Chun, Wang, Wei-Lin, Tiwari, Rajanish N., Chang, LiТом:
18
Мова:
english
Журнал:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.10.018
Date:
February, 2009
Файл:
PDF, 708 KB
english, 2009