SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - CMOS compatible low-frequency aluminium nitride MEMS piezoelectric energy harvesting device
Jackson, N., O'Keeffe, R., O'Neill, M., Waldron, F., Mathewson, A., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaТом:
8763
Рік:
2013
Мова:
english
DOI:
10.1117/12.2016469
Файл:
PDF, 347 KB
english, 2013