The dynamic response of electrostatically driven resonators under mechanical shock
Ibrahim, Mahmoud I, Younis, Mohammad IТом:
20
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/2/025006
Date:
February, 2010
Файл:
PDF, 862 KB
english, 2010