Influence of d.c. substrate bias voltage on growth of cubic boron nitride films by radio frequency sputter
Deng, Jinxiang, Wang, Bo, Tan, Liwen, Cui, Bentao, Yan, Hui, Chen, Guanghua, Wong, S.P, Kwok, R.W.M, Lau, Leo W.MТом:
9
Мова:
english
Журнал:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00310-1
Date:
September, 2000
Файл:
PDF, 98 KB
english, 2000