Self-Assembly in Silane/Hydrogen Plasmas: from Silicon Atoms to Aromatic Silicon Nanocrystals
Forero-Martinez, Nancy C., Le, Ha-Linh Thi, Vach, HolgerТом:
34
Мова:
english
Журнал:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-013-9500-6
Date:
May, 2014
Файл:
PDF, 312 KB
english, 2014