Numerical simulation of the temperature distribution in a planetary MOCVD reactor
Tsai, Ming-Lun, Fang, Cheng-Chia, Lee, Lung-YuТом:
81
Мова:
english
Журнал:
Chemical Engineering and Processing: Process Intensification
DOI:
10.1016/j.cep.2014.04.001
Date:
July, 2014
Файл:
PDF, 4.36 MB
english, 2014