Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications
Ilgünsatiroglu, Emre, Illarionov, Alexey Yu., Ciappa, MauroТом:
53
Мова:
english
Журнал:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2013.07.131
Date:
September, 2013
Файл:
PDF, 1.12 MB
english, 2013
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