Reactive sputtering of Cu2ZnSnS4 thin films — Target effects on the deposition process stability
Kubart, Tomáš, Ericson, Tove, Scragg, Jonathan J., Edoff, Marika, Platzer-Björkman, CharlotteТом:
240
Мова:
english
Журнал:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.12.042
Date:
February, 2014
Файл:
PDF, 565 KB
english, 2014