Characterization of Si etching with N-fluoropyridinium salt
Tsukamoto, Kentaro, Uchikoshi, Junichi, Otani, Masaki, Hirano, Toshinori, Ie, Yutaka, Nagai, Takabumi, Adachi, Kenji, Kawai, Kentaro, Arima, Kenta, Morita, MizuhoТом:
12
Мова:
english
Журнал:
Current Applied Physics
DOI:
10.1016/j.cap.2012.05.005
Date:
December, 2012
Файл:
PDF, 510 KB
english, 2012