ZrB2 thin films grown by high power impulse magnetron sputtering from a compound target
Samuelsson, Mattias, Jensen, Jens, Helmersson, Ulf, Hultman, Lars, Högberg, HansТом:
526
Мова:
english
Журнал:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.006
Date:
December, 2012
Файл:
PDF, 496 KB
english, 2012