Effect of concentration of tetrapropylammonium hydroxide on silica suspensions for making spin-on porous low dielectric constant films
Li, Ting-Yi, Chang, Chiung-Yun, Wan, Ben-ZuТом:
562
Мова:
english
Журнал:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.04.074
Date:
July, 2014
Файл:
PDF, 1.42 MB
english, 2014