Evolution of aluminum nitride nanostructures from nanoflower to thin film on silicon substrate by direct nitridation of aluminum precursor
Yu, Leshu, Hu, Zheng, Ma, Yanwen, Huo, Kaifu, Chen, Yi, Sang, Hai, Lin, Weiwei, Lu, YinongТом:
16
Мова:
english
Журнал:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.02.008
Date:
August, 2007
Файл:
PDF, 591 KB
english, 2007