Characterization of magnetron sputtered carbon nitride films
Kulisch, W, Delplancke-Ogletree, M.P, Buliř, J, Jelı́nek, M, Jurek, K, Zemek, J, Klimovič, JТом:
8
Мова:
english
Журнал:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00452-X
Date:
June, 1999
Файл:
PDF, 188 KB
english, 1999