P2IMS depth profile analysis of high temperature boron oxynitride dielectric films
Badi, N., Vijayaraghavan, S., Benqaoula, A., Tempez, A., Tauziède, C., Chapon, P.Том:
292
Мова:
english
Журнал:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.09.056
Date:
February, 2014
Файл:
PDF, 690 KB
english, 2014