The impact on in-situ-hydrogen-plasma treatment for zinc oxide plasma enhanced atomic layer deposition
Kwon, Jung-Dae, Lee, Jae-Won, Nam, Kee-Seok, Kim, Dong-Ho, Jeong, Yongsoo, Kwon, Se-Hun, Park, Jin-SeongТом:
12
Мова:
english
Журнал:
Current Applied Physics
DOI:
10.1016/j.cap.2012.02.044
Date:
September, 2012
Файл:
PDF, 657 KB
english, 2012