Size-dependent adhesion of nanopatterns for nanoimprint applications
Kwang-Seop Kim,Ki-Don Kim,Jun-Ho Jeong,Hak-Joo Lee…Том:
9
Мова:
english
Журнал:
Electronic Materials Letters
DOI:
10.1007/s13391-013-6027-1
Date:
November, 2013
Файл:
PDF, 768 KB
english, 2013