[IEEE ESSDERC 2003. 33rd European Solid-State Device Research - ESSDERC '03 - Estoril, Portugal (16-18 Sept. 2003)] Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710) - Silicon clean impact on 90nm CMOS devices performance
Carrere, J.-P., Bernard, H., Petitdidier, S., Beverina, A., Rosa, J., Guyader, F.Рік:
2003
Мова:
english
DOI:
10.1109/ESSDERC.2003.1256857
Файл:
PDF, 264 KB
english, 2003