Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height
Terasawa, Tsuneo, Yamane, Takeshi, Tanaka, Toshihiko, Iwasaki, Teruo, Suga, Osamu, Tomie, ToshihisaТом:
48
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.06fa04
Date:
June, 2009
Файл:
PDF, 341 KB
english, 2009