Large area sub-wavelength azo-polymer gratings by waveguide modes interference lithography
Wang, Xiangxian, Zhang, Douguo, Chen, Yikai, Zhu, Liangfu, Yu, Wenhai, Wang, Pei, Yao, Peijun, Ming, Hai, Wu, Wenxuan, Zhang, QijinТом:
102
Рік:
2013
Мова:
english
Журнал:
Applied Physics Letters
DOI:
10.1063/1.4788754
Файл:
PDF, 3.92 MB
english, 2013