High-Performance and Low-Temperature-Compatible p-Channel Polycrystalline-Silicon TFTs Using Hafnium-Silicate Gate Dielectric
Yang, Ming-Jui, Chien, Chao-Hsin, Lu, Yi-Hsien, Luo, Guang-Li, Chiu, Su-Ching, Lou, Chun-Che, Huang, Tiao-YuanТом:
28
Мова:
english
Журнал:
IEEE Electron Device Letters
DOI:
10.1109/LED.2007.904901
Date:
October, 2007
Файл:
PDF, 349 KB
english, 2007