[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - High-k/metal gates in the 2010s
James, DickРік:
2014
Мова:
english
DOI:
10.1109/asmc.2014.6846970
Файл:
PDF, 8.79 MB
english, 2014