[IEEE IEEE Region 10 International Conference on Electrical and Electronic Technology - Singapore (19-22 Aug. 2001)] Proceedings of IEEE Region 10 International Conference on Electrical and Electronic Technology. TENCON 2001 (Cat. No.01CH37239) - A novel sub-50 nm poly-Si gate patterning technology
Shengdong Zhang,, Mansun Chan,, Ruqi Han,, Xiaoyan Liu,, Ting Li,, Dacheng Zhang,Том:
2
Рік:
2001
Мова:
english
DOI:
10.1109/tencon.2001.949712
Файл:
PDF, 445 KB
english, 2001
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