[IEEE IWSM. 1998 3rd International Workshop on Statistical Metrology - Honolulu, HI, USA (7 June 1998)] IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113) - The effect of deterministic spatial variations in retrograde well implants on shallow trench isolation and latchup immunity
Kapila, D., Jain, A., Nandakumar, M., Ashburn, S., Vasanth, K., Sridhar, S.Рік:
1998
Мова:
english
DOI:
10.1109/iwstm.1998.729774
Файл:
PDF, 234 KB
english, 1998
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