Analytical approach and numerical α-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources
Elata, D., Bochobza-Degani, O., Nemirovsky, Y.Том:
12
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.818456
Date:
October, 2003
Файл:
PDF, 1.03 MB
english, 2003
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