Sheet Resistance Measurement of Non-Standard Cleanroom Materials Using Suspended Greek Cross Test Structures
Enderling, S., Smith, C.L.S., Dicks, M.H., Stevenson, J.T.M., Mitkova, M., Kozicki, M.N., Walton, A.J.Том:
19
Мова:
english
Журнал:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2005.863248
Date:
February, 2006
Файл:
PDF, 1.13 MB
english, 2006