[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - A trench-sidewall single-wafer-MEMS technology and its typical application in high-performance accelerometers
Xinxin Li,, Baoluo Cheng,, Yuclin Wang,, Lei Gu,, Jian Dong,, Heng Yang,, Zhaohui Song,Рік:
2004
Мова:
english
DOI:
10.1109/iedm.2004.1419059
Файл:
PDF, 273 KB
english, 2004
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