[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Hermetic thin film encapsulation of mechanical transducers for smart label applications
Reuter, D., Nowack, M., Rennau, M., Bertz, A., Wiemer, M., Kriebel, F., Gessner, T.Рік:
2009
Мова:
english
DOI:
10.1109/sensor.2009.5285526
Файл:
PDF, 911 KB
english, 2009
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