Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application
Soon, Bo Woon, Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Qian, You, Kenny, Thomas W., Lee, ChengkuoТом:
23
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2305754
Date:
October, 2014
Файл:
PDF, 5.00 MB
english, 2014
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