Diffraction Grating for an Integrated CMOS-Compatible Optical Phase-Shift Sensor
Arguel, Philippe, Valentin, JÉrÔme, Bouchard, Olivier, Bonnefont, Sophie, Lozes-Dupuy, FranÇoiseТом:
7
Мова:
english
Журнал:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2007.910053
Date:
December, 2007
Файл:
PDF, 426 KB
english, 2007