A Novel Micromachining Process Using DRIE, Thermal Oxidation, Electroplating, and Planarization to Create High Aspect Ratio Coplanar Waveguides
Todd, Shane T., Huang, Xiaojun T., Bowers, John E., MacDonald, Noel C.Том:
19
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2009.2036745
Date:
February, 2010
Файл:
PDF, 1.09 MB
english, 2010