[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Exploring ISSG process space [Si oxidation]
Sullivan, N., Raja, L.L., Kee, R.J., Yokota, Y., Williams, M.Рік:
2001
Мова:
english
DOI:
10.1109/rtp.2001.1013750
Файл:
PDF, 1.13 MB
english, 2001
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