Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2006 Vol. 251; Iss. 2
Molecular dynamic simulation on boron cluster implantation for shallow junction formation
Li Yuan, Min Yu, Wei Li, Huihui Ji, Liming Ren, Kai Zhan, Ru Huang, Xing Zhang, Yangyuan Wang, Jinyu Zhang, Hideki OkaТом:
251
Рік:
2006
Мова:
english
Сторінки:
5
DOI:
10.1016/j.nimb.2006.08.003
Файл:
PDF, 268 KB
english, 2006