Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 8-9
Low temperature formation of luminescent Si nanocrystals with combined process of excimer UV-light irradiation and RTA
T.S. Iwayama, S. Fukaya, H. Watanabe, T. Hama, D.E. HoleТом:
267
Рік:
2009
Мова:
english
Сторінки:
4
DOI:
10.1016/j.nimb.2009.01.040
Файл:
PDF, 352 KB
english, 2009